TY  - RPRT
TI  - Infrared vertically-illuminated photodiode for chip alignment feedback
AU  - Luca Alloatti
AU  - Rajeev Jagga Ram
PY  - 2016
DO  - 10.1063/1.4961949
UR  - https://arxiv.org/abs/1606.08870
ID  - 1606.08870
ER  -