@misc{indiciae44804c01af23, title = {Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges}, author = {Jan Trieschmann and Frederik Schmidt and Thomas Mussenbrock}, year = {2016}, doi = {10.1002/ppap.201600140}, url = {https://arxiv.org/abs/1607.04069}, note = {Source identifier: 1607.04069} }