TY  - RPRT
TI  - Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges
AU  - Jan Trieschmann
AU  - Frederik Schmidt
AU  - Thomas Mussenbrock
PY  - 2016
DO  - 10.1002/ppap.201600140
UR  - https://arxiv.org/abs/1607.04069
ID  - 1607.04069
ER  -