@misc{indiciae8fef6ea23484,
  title = {Study Of Si-Ge Interdiffusion With a High Phosphorus Doping Concentration},
  author = {Feiyang Cai and Dalaver H. Anjum and Xixiang Zhang and Guangrui and Xia},
  year = {2016},
  doi = {10.1063/1.4966570},
  url = {https://arxiv.org/abs/1608.01029},
  note = {Source identifier: 1608.01029}
}