@misc{indiciae3367288f31f2,
  title = {Hyper-lithography},
  author = {Jingbo Sun and Tianboyu Xu and Natalia M. Litchinitser},
  year = {2016},
  url = {https://arxiv.org/abs/1608.02864},
  note = {Source identifier: 1608.02864}
}