@misc{indiciae89d9faafc0de, title = {Advanced fluid modelling and PIC/MCC simulations of low-pressure ccrf discharges}, author = {Markus M. Becker and Hanno Kählert and Anbang Sun and Michael Bonitz and Detlef Loffhagen}, year = {2017}, doi = {10.1088/1361-6595/aa5cce}, url = {https://arxiv.org/abs/1608.04601}, note = {Source identifier: 1608.04601} }