TY  - RPRT
TI  - Advanced fluid modelling and PIC/MCC simulations of low-pressure ccrf discharges
AU  - Markus M. Becker
AU  - Hanno Kählert
AU  - Anbang Sun
AU  - Michael Bonitz
AU  - Detlef Loffhagen
PY  - 2017
DO  - 10.1088/1361-6595/aa5cce
UR  - https://arxiv.org/abs/1608.04601
ID  - 1608.04601
ER  -