@misc{indiciaeb4e45567fd9f,
  title = {Ultra-smooth single crystal diamond surfaces resulting from implantation and lift-off processes},
  author = {T. N. Tran Thi and B. Fernandez and D. Eon and E. Gheeraert and J. Hartwig and T. A. Lafford and A. Perrat-Mabilon and C. Peaucelle and P. Olivero and E. Bustarret},
  year = {2016},
  doi = {10.1002/pssa.201100038},
  url = {https://arxiv.org/abs/1608.07171},
  note = {Source identifier: 1608.07171}
}