@misc{indiciae18de4825c459, title = {Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization}, author = {P. Olivero and G. Amato and F. Bellotti and O. Budnyk and E. Colombo and M. Jaksic and A. Lo Giudice and C. Manfredotti and Z. Pastuovic and F. Picollo and N. Skukan and M. Vannoni and E. Vittone}, year = {2016}, doi = {10.1016/j.diamond.2008.10.068}, url = {https://arxiv.org/abs/1608.07427}, note = {Source identifier: 1608.07427} }