@misc{indiciaeef959c9b21dd, title = {Finite element analysis of ion-implanted diamond surface swelling}, author = {F. Bosia and P. Olivero and E. Vittone and F. Picollo and A. Lo Giudice and M. Jaksic and N. Skukan and L. Giuntini and M. Massi and S. Calusi and M. Vannoni and S. Lagomarsino and S. Sciortino}, year = {2016}, doi = {10.1016/j.nimb.2010.05.025}, url = {https://arxiv.org/abs/1608.08111}, note = {Source identifier: 1608.08111} }