@misc{indiciaeb35732fa1bff, title = {Semiconductor characterization by scanning ion beam induced charge (IBIC) microscopy}, author = {E. Vittone and Z. Pastuovic and P. Olivero and C. Manfredotti and M. Jaksic and A. Lo Giudice and F. Fizzotti and E. Colombo}, year = {2016}, doi = {10.1016/j.nimb.2007.12.083}, url = {https://arxiv.org/abs/1609.00236}, note = {Source identifier: 1609.00236} }