@misc{indiciae8abbdfee8e23,
  title = {Reactive magnetron sputter deposition of superconducting niobium titanium nitride thin films with different target sizes},
  author = {B. G. C. Bos and D. J. Thoen and E. A. F. Haalebos and P. M. L. Gimbel and T. M. Klapwijk and J. J. A. Baselmans and A. Endo},
  year = {2016},
  doi = {10.1109/tasc.2016.2631939},
  url = {https://arxiv.org/abs/1609.01265},
  note = {Source identifier: 1609.01265}
}