@misc{indiciaeca2d83b4ace6,
  title = {Superconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer},
  author = {D. J. Thoen and B. G. C. Bos and E. A. F. Haalebos and T. M. Klapwijk and J. J. A. Baselmans and A. Endo},
  year = {2016},
  doi = {10.1109/tasc.2016.2631948},
  url = {https://arxiv.org/abs/1609.01526},
  note = {Source identifier: 1609.01526}
}