TY  - RPRT
TI  - Submicrometer tomographic resolution examined using a micro-fabricated test object
AU  - Ryuta Mizutani
AU  - Akihisa Takeuchi
AU  - R. Yoshiyuki Osamura
AU  - Susumu Takekoshi
AU  - Kentaro Uesugi
AU  - Yoshio Suzuki
PY  - 2016
DO  - 10.1016/j.micron.2009.09.001
UR  - https://arxiv.org/abs/1609.02270
ID  - 1609.02270
ER  -