@misc{indiciae79d3fcb27a0d,
  title = {High-efficiency generation of nanoscale single silicon vacancy defect array in silicon carbide},
  author = {Junfeng Wang and Yu Zhou and Xiaoming Zhang and Fucai Liu and Yan Li and Ke Li and Zheng Liu and Guanzhong Wang and Weibo Gao},
  year = {2016},
  doi = {10.1103/physrevapplied.7.064021},
  url = {https://arxiv.org/abs/1610.03978},
  note = {Source identifier: 1610.03978}
}