@misc{indiciaef7eea13efca8, title = {Fabrication and Analysis of Three-Layer All-Silicon Interference Optical Filter with Sub-Wavelength Structure toward High Performance Terahertz Optics}, author = {Hironobu Makitsubo and Takehiko Wada and Hirokazu Kataza and Makoto Mita and Toyoaki Suzuki and Keita Yamamoto}, year = {2016}, doi = {10.1007/s10762-016-0328-z}, url = {https://arxiv.org/abs/1610.07071}, note = {Source identifier: 1610.07071} }