TY  - RPRT
TI  - Fabrication and Analysis of Three-Layer All-Silicon Interference Optical Filter with Sub-Wavelength Structure toward High Performance Terahertz Optics
AU  - Hironobu Makitsubo
AU  - Takehiko Wada
AU  - Hirokazu Kataza
AU  - Makoto Mita
AU  - Toyoaki Suzuki
AU  - Keita Yamamoto
PY  - 2016
DO  - 10.1007/s10762-016-0328-z
UR  - https://arxiv.org/abs/1610.07071
ID  - 1610.07071
ER  -