@misc{indiciae5f510514a5bb,
  title = {Development of Yttrium alloy ion source and its application in nanofabrication},
  author = {Nadezhda Kukharchyk and Ronna Neumann and Swetlana Mazarov and Pavel Bushev and Andreas Wieck and Paul Mazarov},
  year = {2016},
  doi = {10.1007/s00339-016-0607-5},
  url = {https://arxiv.org/abs/1610.07166},
  note = {Source identifier: 1610.07166}
}