TY  - RPRT
TI  - Development of Yttrium alloy ion source and its application in nanofabrication
AU  - Nadezhda Kukharchyk
AU  - Ronna Neumann
AU  - Swetlana Mazarov
AU  - Pavel Bushev
AU  - Andreas Wieck
AU  - Paul Mazarov
PY  - 2016
DO  - 10.1007/s00339-016-0607-5
UR  - https://arxiv.org/abs/1610.07166
ID  - 1610.07166
ER  -