@misc{indiciaeace517c4bd46,
  title = {Deep Reactive Ion Etched Anti-Reflection Coatings for Sub-millimeter Silicon Optics},
  author = {Patricio A. Gallardo and Brian J. Koopman and Nicholas Cothard and Sarah Marie M. Bruno and German Cortes-Medellin and Galen Marchetti and Kevin H. Miller and Brenna Mockler and Michael D. Niemack and Gordon Stacey and Edward J. Wollack},
  year = {2016},
  doi = {10.1364/ao.56.002796},
  url = {https://arxiv.org/abs/1610.07655},
  note = {Source identifier: 1610.07655}
}