@misc{indiciae6c0229e90357,
  title = {PTFE surface etching in the post-discharge of a RF scanning plasma torch: evidence of ejected fluorinated species},
  author = {Thierry Dufour and Julie Hubert and Pascal Viville and Corinne Y. Duluard and Simon Desbief and Roberto Lazzaroni and François Reniers},
  year = {2016},
  doi = {10.1002/ppap.201100209},
  url = {https://arxiv.org/abs/1611.03876},
  note = {Source identifier: 1611.03876}
}