TY  - RPRT
TI  - PTFE surface etching in the post-discharge of a RF scanning plasma torch: evidence of ejected fluorinated species
AU  - Thierry Dufour
AU  - Julie Hubert
AU  - Pascal Viville
AU  - Corinne Y. Duluard
AU  - Simon Desbief
AU  - Roberto Lazzaroni
AU  - François Reniers
PY  - 2016
DO  - 10.1002/ppap.201100209
UR  - https://arxiv.org/abs/1611.03876
ID  - 1611.03876
ER  -