@misc{indiciaebc56bd577085,
  title = {Diffusion of Hydrogen in Proton Implanted Silicon: Dependence on the Hydrogen Concentration},
  author = {Martin Faccinelli and Stefan Kirnstoetter and Moriz Jelinek and Thomas Wuebben and Johannes G. Laven and Hans-Joachim Schulze and Peter Hadley},
  year = {2016},
  url = {https://arxiv.org/abs/1611.04312},
  note = {Source identifier: 1611.04312}
}