@misc{indiciae474e5a3f0160,
  title = {Search for potential precursors for Si-atomic layer deposition- a quantum chemical study},
  author = {P. Vajeeston and H. Fjellvåg and a and O. Nilsen},
  year = {2016},
  url = {https://arxiv.org/abs/1611.04355},
  note = {Source identifier: 1611.04355}
}