TY  - RPRT
TI  - Search for potential precursors for Si-atomic layer deposition- a quantum chemical study
AU  - P. Vajeeston
AU  - H. Fjellvåg
AU  - a
AU  - O. Nilsen
PY  - 2016
UR  - https://arxiv.org/abs/1611.04355
ID  - 1611.04355
ER  -