@misc{indiciaecc29a3534e54,
  title = {Numerical Modeling of MEMS Resonators},
  author = {Hamid T. Chorsi and Meysam T. Chorsi and Stephen D. Gedney},
  year = {2016},
  url = {https://arxiv.org/abs/1611.05310},
  note = {Source identifier: 1611.05310}
}