TY  - RPRT
TI  - Numerical Modeling of MEMS Resonators
AU  - Hamid T. Chorsi
AU  - Meysam T. Chorsi
AU  - Stephen D. Gedney
PY  - 2016
UR  - https://arxiv.org/abs/1611.05310
ID  - 1611.05310
ER  -