@misc{indiciaeec792bc51a70,
  title = {Raman studies on nanocomposite silicon carbonitride thin film deposited by RF magnetron sputtering at different substrate temperatures},
  author = {A. S. Bhattacharyya and S. K. Mishra},
  year = {2016},
  doi = {10.1002/jrs.2588},
  url = {https://arxiv.org/abs/1611.07927},
  note = {Source identifier: 1611.07927}
}