TY  - RPRT
TI  - Raman studies on nanocomposite silicon carbonitride thin film deposited by RF magnetron sputtering at different substrate temperatures
AU  - A. S. Bhattacharyya
AU  - S. K. Mishra
PY  - 2016
DO  - 10.1002/jrs.2588
UR  - https://arxiv.org/abs/1611.07927
ID  - 1611.07927
ER  -