@misc{indiciae260afb383c1f, title = {Study of ZrO2 Thin Films Deposited at Glancing Angle by Magnetron Sputtering under Varying Substrate Rotation}, author = {R. B. Tokas and S. Jena and J. S. Mishal and K. Divakar Rao and S. R. Polaki and C. Pratap and D. V. Udupa and S. Thakur and Sanjiv Kumar and N. K. Sahoo}, year = {2016}, url = {https://arxiv.org/abs/1612.02627}, note = {Source identifier: 1612.02627} }