TY  - RPRT
TI  - Topography preserved microwave plasma etching for top-down layer engineering in MoS2 and other van der Waals materials
AU  - Abin Varghese
AU  - Chithra H. Sharma and
AU  - Madhu Thalakulam
PY  - 2016
DO  - 10.1039/c7nr00284j
UR  - https://arxiv.org/abs/1612.04125
ID  - 1612.04125
ER  -