TY  - RPRT
TI  - Annealing shallow Si/SiO$_2$ interface traps in electron-beam irradiated high-mobility metal-oxide-silicon transistors
AU  - Jin-Sung Kim
AU  - Alexei M. Tyryshkin
AU  - Stephen A. Lyon
PY  - 2017
DO  - 10.1063/1.4979035
UR  - https://arxiv.org/abs/1612.08729
ID  - 1612.08729
ER  -