@misc{indiciae4f39ec398ac2, title = {The Use of KF Style Flanges In Low Particulate Applications}, author = {K. R. Kendziora and J. Angelo and C. Baffes and D. Franck and R. Kellett}, year = {2017}, url = {https://arxiv.org/abs/1701.00842}, note = {Source identifier: 1701.00842} }