@misc{indiciae2da5d634042a,
  title = {Quantitative depth profiling of Si1-xGex structures by time-of-flight secondary ion mass spectrometry and secondary neutral mass spectrometry},
  author = {M. N. Drozdov and Y. N. Drozdov and A. Csik and A. V. Novikov and K. Vad and P. A. Yunin and D. V. Yurasov and S. F. Belykh and G. P. Gololobov and D. V. Suvorov and A. Tolstogouzov},
  year = {2017},
  doi = {10.1016/j.tsf.2016.03.049},
  url = {https://arxiv.org/abs/1701.01612},
  note = {Source identifier: 1701.01612}
}