@misc{indiciae8247f3bbe260,
  title = {Ultrahigh-Q optomechanical crystals cavities fabricated on a CMOS foundry},
  author = {Rodrigo Benevides and Felipe G. S. Santos and Gustavo O. Luiz and Gustavo S. Wiederhecker and Thiago P. Mayer Alegre},
  year = {2017},
  doi = {10.1038/s41598-017-02515-4},
  url = {https://arxiv.org/abs/1701.03410},
  note = {Source identifier: 1701.03410}
}