TY  - RPRT
TI  - Ultrahigh-Q optomechanical crystals cavities fabricated on a CMOS foundry
AU  - Rodrigo Benevides
AU  - Felipe G. S. Santos
AU  - Gustavo O. Luiz
AU  - Gustavo S. Wiederhecker
AU  - Thiago P. Mayer Alegre
PY  - 2017
DO  - 10.1038/s41598-017-02515-4
UR  - https://arxiv.org/abs/1701.03410
ID  - 1701.03410
ER  -