TY  - RPRT
TI  - Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride resonators
AU  - Thibault Capelle
AU  - Yeghishe Tsaturyan
AU  - Andreas Barg
AU  - Albert Schliesser
PY  - 2017
DO  - 10.1063/1.4982876
UR  - https://arxiv.org/abs/1702.01732
ID  - 1702.01732
ER  -