TY  - RPRT
TI  - Three-dimensional nanoimprint lithography using two-photon lithography master samples
AU  - Rebecca Saive
AU  - Colton R. Bukowsky
AU  - Harry A. Atwater
PY  - 2017
UR  - https://arxiv.org/abs/1702.04012
ID  - 1702.04012
ER  -