TY  - RPRT
TI  - Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials
AU  - Nicola Manca
AU  - Luca Pellegrino
AU  - Teruo Kanki
AU  - Syouta Yamasaki
AU  - Hidekazu Tanaka
AU  - Antonio Sergio Siri
AU  - Daniele Marré
PY  - 2017
DO  - 10.1002/adma.201302087
UR  - https://arxiv.org/abs/1702.06194
ID  - 1702.06194
ER  -