@misc{indiciae226c2060ac5a,
  title = {Modeling Study of Laser Beam Scattering by Defects on Semiconductor Wafers},
  author = {Srikumar Sandeep and Alexander Kokhanovsky},
  year = {2017},
  url = {https://arxiv.org/abs/1702.07051},
  note = {Source identifier: 1702.07051}
}