@misc{indiciae5bc71537d33b, title = {Stable dynamics of micro-machined inductive contactless suspensions}, author = {Kirill V Poletkin and Zhiqiu Lu and Ulrike Wallrabe and Jan Korvink and Vlad Badilita}, year = {2017}, doi = {10.1016/j.ijmecsci.2017.08.016}, url = {https://arxiv.org/abs/1703.01929}, note = {Source identifier: 1703.01929} }