TY - RPRT TI - Stable dynamics of micro-machined inductive contactless suspensions AU - Kirill V Poletkin AU - Zhiqiu Lu AU - Ulrike Wallrabe AU - Jan Korvink AU - Vlad Badilita PY - 2017 DO - 10.1016/j.ijmecsci.2017.08.016 UR - https://arxiv.org/abs/1703.01929 ID - 1703.01929 ER -