@misc{indiciae7d467feb22dc,
  title = {Scalable fabrication of single silicon vacancy defect arrays in silicon carbide using focused ion beam},
  author = {Junfeng Wang and Xiaoming Zhang and Yu Zhou and Ke Li and Ziyu Wang and Phani Peddibhotla and Fucai Liu and Sven Bauerdick and Axel Rudzinski and Zheng Liu and Weibo Gao},
  year = {2017},
  doi = {10.1021/acsphotonics.7b00230},
  url = {https://arxiv.org/abs/1703.04479},
  note = {Source identifier: 1703.04479}
}