@misc{indiciaea532e2b60b0f, title = {Anisotropic Etching of Graphite and Graphene in a Remote Hydrogen Plasma}, author = {Dorothee Hug and Simon Zihlmann and Mirko K. Rehmann and Yemliha B. Kalyoncu and Timothy N. Camenzind and Laurent Marot and Kenji Watanabe and Takashi Taniguchi and Dominik M. Zumbühl}, year = {2017}, doi = {10.1038/s41699-017-0021-7}, url = {https://arxiv.org/abs/1703.04762}, note = {Source identifier: 1703.04762} }