@misc{indiciae4ee3d3cdfb46,
  title = {Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications},
  author = {John Hennessy and Christopher S. Moore and Kunjithapatham Balasubramanian and April D. Jewell and Kevin France and Shouleh Nikzad},
  year = {2017},
  doi = {10.1116/1.4986945},
  url = {https://arxiv.org/abs/1703.05469},
  note = {Source identifier: 1703.05469}
}