TY  - RPRT
TI  - Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications
AU  - John Hennessy
AU  - Christopher S. Moore
AU  - Kunjithapatham Balasubramanian
AU  - April D. Jewell
AU  - Kevin France
AU  - Shouleh Nikzad
PY  - 2017
DO  - 10.1116/1.4986945
UR  - https://arxiv.org/abs/1703.05469
ID  - 1703.05469
ER  -