@misc{indiciae9306ce1bc179, title = {Graphene photodetectors with a bandwidth larger than 76 GHz fabricated in a 6 inch wafer process line}, author = {Daniel Schall and Caroline Porschatis and Martin Otto and Daniel Neumaier}, year = {2017}, doi = {10.1088/1361-6463/aa5c67}, url = {https://arxiv.org/abs/1703.05637}, note = {Source identifier: 1703.05637} }