@misc{indiciae753e107ef798,
  title = {Microscopic Mechanism of Carbon Annihilation upon SiC Oxidation due to Phosphorous Treatment: Density-Functional Calculations Combined with Ion Mass Spectrometry},
  author = {Takuma Kobayashi and Yu-ichiro Matsushita and Takafumi Okuda and Tsunenobu Kimoto and Atsushi Oshiyama},
  year = {2017},
  doi = {10.7567/apex.11.121301},
  url = {https://arxiv.org/abs/1703.08063},
  note = {Source identifier: 1703.08063}
}