TY  - RPRT
TI  - Microscopic Mechanism of Carbon Annihilation upon SiC Oxidation due to Phosphorous Treatment: Density-Functional Calculations Combined with Ion Mass Spectrometry
AU  - Takuma Kobayashi
AU  - Yu-ichiro Matsushita
AU  - Takafumi Okuda
AU  - Tsunenobu Kimoto
AU  - Atsushi Oshiyama
PY  - 2017
DO  - 10.7567/apex.11.121301
UR  - https://arxiv.org/abs/1703.08063
ID  - 1703.08063
ER  -