@misc{indiciae613139d1ef90,
  title = {A comparative study of resists and lithographic tools using the Lumped Parameter Model},
  author = {Roberto Fallica and Robert Kirchner and Dominique Mailly and Yasin Ekinci},
  year = {2017},
  doi = {10.1116/1.4967183},
  url = {https://arxiv.org/abs/1703.08229},
  note = {Source identifier: 1703.08229}
}